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Vacuum Control Unit

Measurement

The 10°shutter can be switched only if before it and behind it the same pressure rules. Therefore, the pressures are measured in the laserray pipe. In Cave Z6 beside heavy beam line standing a Rack with vacuum measuring instruments.

In addition two vacuum measurement devices (Balzers TPG 300) are installed. These devices have a relay interface card (IF 300) which the programmed switch thresholds deliver to the PLC.

Switch Outputs

Here you can see the thresholds:
How to programming the thresholds you can read in the attachment "Balzers TPG300".

Controlling

The switch outputs are going to TwinSAFE^® inputs (TSi_). In the PLC-program you find the definition under "Globale_Eingaenge" -> "Sicherheits-Eingänge" -> "Targetkabine-A20" -> "A11a":
TSi_VP_DruckNormal_TK:BOOL;
TSi_VP_DruckVakuum_TK:BOOL;
TSi_VP_DruckNormal_PH:BOOL;
TSi_VP_DruckVakuum_PH:BOOL;
These inputs are going to the machine monitoring FB MM_Enable_V10Grad (FB 215):

The FB output "Enable_V10Grad" goes to the logic FB AND_V_10Grad (FB 212) to AndIn4 :

The shutter can be opened, if

• PLC gives the open signal (show the following programm)
• mirror switch 10° is closed (from compressor bay)
• warning light "laserclass4" is on
• shutter is enabled

The signal open_PHELIX_shutter came from the PLC program "ag_Bedienpult_PHELIX_shutter":


The schematic plan you can find over "Adressenplan" -> "+Targetkabine" -> "+A20".

You see, that the output symbol is placed on sheet 209.C6 . Jump to this sheet with right mouse click of this text and select "Gehe zum Stromlaufplan".

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-- UweThiemer - 13 Nov 2008