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Vacuum Control Unit


The 10°shutter can be switched only if before it and behind it the same pressure rules. Therefore, the pressures are measured in the laserray pipe. In Cave Z6 beside heavy beam line standing a Rack with vacuum measuring instruments.
vacuum measurement

In addition two vacuum measurement devices (Balzers TPG 300) are installed. These devices have a relay interface card (IF 300) which the programmed switch thresholds deliver to the PLC. vacuum switch outputs

Switch Outputs

Here you can see the thresholds: vacuum control
TIP How to programming the thresholds you can read in the attachment "Balzers TPG300".


The switch outputs are going to TwinSAFE® inputs (TSi_). In the PLC-program you find the definition under "Globale_Eingaenge" -> "Sicherheits-Eingänge" -> "Targetkabine-A20" -> "A11a":
These inputs are going to the machine monitoring FB MM_Enable_V10Grad (FB 215):

The FB output "Enable_V10Grad" goes to the logic FB AND_V_10Grad (FB 212) to AndIn4 :
The shutter can be opened, if
  • PLC gives the open signal (show the following programm)
  • mirror switch 10° is closed (from compressor bay)
  • warning light "laserclass4" is on
  • shutter is enabled
The signal open_PHELIX_shutter came from the PLC program "ag_Bedienpult_PHELIX_shutter":
PLC program ag

The schematic plan you can find over "Adressenplan" -> "+Targetkabine" -> "+A20".
E3 Adressen TK
You see, that the output symbol is placed on sheet 209.C6 . Jump to this sheet with right mouse click of this text and select "Gehe zum Stromlaufplan".

-- UweThiemer - 13 Nov 2008
Topic revision: r3 - 2008-11-13, UweThiemer - This page was cached on 2021-09-25 - 14:50.

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